FM-WM12-PDS-V01

Wafer Automated Optical Inspection (AOI) Equipment by Fastmicro B.V. (3 more products)

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FM-WM12-PDS-V01 Image

Product Specifications

Product Details

  • Part Number
    FM-WM12-PDS-V01
  • Manufacturer
    Fastmicro B.V.

General Parameters

  • Die Size
    150, 200, 300 mm
  • Overall Dimensions
    1602 x 755 x 2099 mm
  • Production Throughput
    400 wph
  • Sensitivity
    200 nm
  • Type
    Particle Defect Inspection System
  • Wafer Size
    12 Inches

Technical Documents