SPE-6000 Series

Wafer Etching System by Showa Shinku Co., Ltd (1 more product)

Note : Your request will be directed to Showa Shinku Co., Ltd.

SPE-6000 Series Image

Product Specifications

Product Details

  • Part Number
    SPE-6000 Series
  • Manufacturer
    Showa Shinku Co., Ltd

General Parameters

  • Applications
    RIE processing for various wafer electronic components
  • Net Weight
    4500 kg
  • Overall Dimensions
    4000 x 3000 x 2200 mm
  • Power Supply
    AC200V(3f)/49kVA(143A)
  • Process Type
    Dry Etching
  • Wafer Size
    4 to 6 Inches

Technical Documents