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IL 3000

Wafer Laser Marking Machine by InnoLas Semiconductor GmbH (7 more products)
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Product Specifications

Product Details

  • Part Number
    IL 3000
  • Manufacturer
    InnoLas Semiconductor GmbH

General Parameters

  • Compressed Dry Air
    6 bar
  • Cooling Mode
    Cooling Water
  • Dot Depth
    0.1 to 100 µm
  • Dot Diameter
    25 to 150 µm
  • Exhaust
    33.6 m³/hr
  • Laser Stability
    ±1%
  • Laser Type
    YAG 355, 532, 1064 & CO2
  • Loading Stations
    4
  • Marking Repeatability
    ±75 µm
  • Net Weight
    1200 kg
  • Overall Dimensions
    1425 x 2003 x 1920 mm
  • Power Supply
    230 V (1P/1N/1PE), 50 Hz, 16 Amps, 1500 W
  • Throughput
    160 wph
  • Wafer Size
    300 mm
  • Water Pressure
    2 to 6 bar
  • Wavelength
    10.600 nm

Technical Documents