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RAD-2512m/12

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Product Specifications

Product Details

  • Part Number
    RAD-2512m/12
  • Manufacturer
    LINTEC Corporation Advanced Materials Operations

General Parameters

  • Air Supply
    0.6 to 0.8 Mpa, 100 L/min
  • Efficiency
    60 sec/wafer
  • Net Weight
    400 kg
  • Overall Dimensions
    1100 x 660 x 1098 mm
  • Power Supply
    Single Phase AC 200-230V 10% 50/60 Hz, 15 kW
  • Type
    Semi Automatic
  • Vaccum
    1.0 Pa
  • Wafer Size
    150 mm, 200 mm, 300 mm

Technical Documents
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