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CA20

Wafer X-Ray Inspection Machine by Comet Yxlon GmbH (4 more products)
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Product Specifications

Product Details

  • Part Number
    CA20
  • Manufacturer
    Comet Yxlon GmbH

General Parameters

  • Defect Size
    1 µm, 50 µm, 1 mm
  • Image Acquisition
    2D, 2.5D, 3D
  • Max Inspection Area
    435 mm
  • Net Weight
    2500 kg
  • Overall Dimensions
    1650 x 1400 x 2050 mm
  • Pixel Matrix
    1536 x 1536 pixel
  • Pixel Pitch
    85 µm
  • Note
    Detector Active Area - 130 x 130 mm

Technical Documents