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ONYX 3200

Wafer X-Ray Inspection Machine by Rigaku Corporation (1 more product)
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Product Specifications

Product Details

  • Part Number
    ONYX 3200
  • Manufacturer
    Rigaku Corporation

General Parameters

  • Detector
    Al, C, N, O, F, S, Ge
  • Field of View
    5 x 5 mm, 1 x 1 mm
  • Focus Spot Size
    10 to 50 µm
  • Image Acquisition
    2D, 3D
  • Magnification
    2X, 10X
  • Pixel Size
    0.435 µm, 2.17 µm

Technical Documents