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RAD-2500m/12

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Product Specifications

Product Details

  • Part Number
    RAD-2500m/12
  • Manufacturer
    LINTEC Corporation Advanced Materials Operations

General Parameters

  • Air Supply
    0.5 to 0.8 Mpa 150 L/min
  • Efficiency
    22 sec/wafer
  • Net Weight
    110 kg
  • Overall Dimensions
    671 x 950 x 527 mm
  • Power Supply
    Single Phase AC 100 (10%) 50/60 Hz, 0.2 kW
  • Type
    Semi Automatic
  • Wafer Size
    300 mm

Technical Documents
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