ATM-12000DR

Wafer Mounting Equipment by Toyo Adtec Co., Ltd (4 more products)

Note : Your request will be directed to Toyo Adtec Co., Ltd.

ATM-12000DR Image

Product Specifications

Product Details

  • Part Number
    ATM-12000DR
  • Manufacturer
    Toyo Adtec Co., Ltd

General Parameters

  • Air Supply
    0.5 Mpa 200 N1/min
  • Efficiency
    40 wafer/h
  • Frame Size
    8 Inches, 12 Inches
  • Membrane Width
    300 mm, 400 mm
  • Net Weight
    2000 kg
  • Overall Dimensions
    2800 x 1800 x 1800 mm
  • Power Supply
    AC 200 V Three phase 50/60 Hz 5.0 KVA
  • Type
    Automatic
  • Wafer Size
    8 Inches, 12 Inches
  • Wafer Thickness
    150 µm

Technical Documents