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ATM-8200

Wafer Mounting Equipment by Toyo Adtec Co., Ltd (4 more products)
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ATM-8200 Image

Product Specifications

Product Details

  • Part Number
    ATM-8200
  • Manufacturer
    Toyo Adtec Co., Ltd

General Parameters

  • Air Supply
    0.5 Mpa 300 N1/min
  • Efficiency
    95 wafer/h
  • Frame Size
    6 Inches, 8 Inches
  • Membrane Width
    230 mm, 300 mm
  • Net Weight
    700 kg
  • Overall Dimensions
    1150 x 1330 x 1800 mm
  • Positioning Accuracy
    0.5 mm
  • Power Supply
    AC 100V Single phase 50/60 Hz 2.0 KVA
  • Type
    Automatic
  • Wafer Size
    4 Inches, 5 Inches, 6 Inches, 8 Inches

Technical Documents
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