AST- 300

Wafer Probe System by Advanced Spectral Technology

Note : Your request will be directed to Advanced Spectral Technology.

Product Specifications

Product Details

  • Part Number
    AST- 300
  • Manufacturer
    Advanced Spectral Technology

General Parameters

  • Accuracy
    1 µm
  • Chuck Size
    325 x 400 mm
  • Type
    Automatic
  • XY Moving Speed
    250 mm/sec
  • Z Accuracy
    1 µm
  • Z Travel Area
    100 mm

Technical Documents