a100

Wafer Probe System by Apollo Wave Inc (7 more products)

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Product Specifications

Product Details

  • Part Number
    a100
  • Manufacturer
    Apollo Wave Inc

General Parameters

  • Chuck Size
    100 x 110 mm
  • Net Weight
    25 kg
  • Operating Temperature
    300 Degree C
  • Overall Dimensions
    320 x 355 x 490 mm
  • Stage Travel Range Fine
    6.5 x 6.5 mm
  • Theta Movement
    5 Degree
  • Type
    Manual
  • Wafer Size
    4 Inches
  • Z Travel Area
    5 mm

Technical Documents