a300CS

Wafer Probe System by Apollo Wave Inc (7 more products)

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Product Specifications

Product Details

  • Part Number
    a300CS
  • Manufacturer
    Apollo Wave Inc

General Parameters

  • Chuck Size
    320 x 320 mm
  • Net Weight
    165 kg
  • Operating Temperature
    -60 to 350 Degree C
  • Overall Dimensions
    965 x 930 x 700 mm
  • Power Supply
    20kV DC/200A
  • Stage Travel Range Fine
    12.5 x 12.5 mm
  • Theta Movement
    4 Degree
  • Type
    Manual
  • Wafer Size
    12 Inches
  • Z Travel Area
    10 mm

Technical Documents