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Cryogenic

Wafer Probe System by Bluefors Oy
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Product Specifications

Product Details

  • Part Number
    Cryogenic
  • Manufacturer
    Bluefors Oy

General Parameters

  • Chuck Size
    160 mm
  • Resolution
    1 µm
  • Theta Movement
    8 Degree
  • Type
    Automatic
  • Wafer Loading
    FOUP or Magazine Wafer Loading
  • Wafer Size
    150 mm, 200 mm, 300 mm
  • Wiring Capacity
    Up to 768 single DC lines, Up to 48 RF lines
  • XY Moving Speed
    Up to 35 mm/sec
  • Z Resolution
    1 µm
  • Z Travel Area
    0 to 40 mm

Technical Documents
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