Precio XL

Wafer Probe System by Tokyo Electron Limited (4 more products)

Note : Your request will be directed to Tokyo Electron Limited.

Product Specifications

Product Details

  • Part Number
    Precio XL
  • Manufacturer
    Tokyo Electron Limited

General Parameters

  • Accuracy
    1.8 µm
  • Probing Force
    200 kg, 300 kg
  • Stage Types
    Linear Motor
  • Type
    Automatic
  • Wafer Size
    200 mm, 300 mm
  • Z Accuracy
    5 µm

Technical Documents