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Summit 11000

Wafer Probe System by FormFactor (10 more products)
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Product Specifications

Product Details

  • Part Number
    Summit 11000
  • Manufacturer
    FormFactor

General Parameters

  • Chuck Flatness
    = 8 µm
  • Chuck Size
    200 mm
  • Net Weight
    4.5 kg
  • Operating Temperature
    -60 to 300 Degree C
  • Overall Dimensions
    745 x 595 x 200 mm
  • Planarity
    10 µm
  • Repeatability
    = 3 µm
  • Resolution
    5 µm
  • Theta Movement
    5.7 Degree
  • Theta Stage Resolution
    0.8 Degree / turn
  • Type
    Manual
  • Wafer Size
    150 mm, 200 mm
  • Z Repeatability
    1 µm, 5 µm

Technical Documents
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