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TESLA300

Wafer Probe System by FormFactor (10 more products)
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Product Specifications

Product Details

  • Part Number
    TESLA300
  • Manufacturer
    FormFactor

General Parameters

  • Accuracy
    = 2 µm, = 0.3 µm
  • Chuck Flatness
    = ± 10 µm
  • Chuck Size
    300 mm
  • Net Weight
    47 kg
  • Operating Temperature
    -60 to 300 Degree C
  • Overall Dimensions
    1058 x 866 x 25 mm
  • Planarity
    ± 5 µm
  • Repeatability
    < 1 µm
  • Resolution
    0.2 µm
  • Theta Movement
    3.75 Degree
  • Theta Stage Accuracy
    = 2 µm, = 5 µm
  • Theta Stage Repeatabilty
    < 1 µm
  • Theta Stage Resolution
    0.2 µm
  • Type
    Semi Automatic
  • Wafer Size
    300 mm
  • XY Moving Speed
    50 mm/s
  • Z Accuracy
    = 2 µm
  • Z Repeatability
    < 1 µm
  • Z Resolution
    0.2 µm
  • Z Travel Area
    10 mm

Technical Documents
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