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SH-12

Wafer Probe System by Instec, Inc (9 more products)
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Product Specifications

Product Details

  • Part Number
    SH-12
  • Manufacturer
    Instec, Inc

General Parameters

  • Chuck Size
    12 x 12 Inches
  • Magnification
    20 to 4000X
  • Net Weight
    300 kg
  • Overall Dimensions
    1300 x 920 x 920 mm
  • Platen Travel Size
    50.8 mm
  • Power Supply
    220V, 50/60 Hz
  • Probe Rotation
    360 Degree
  • Resolution
    1 µm
  • Stage Travel Range Fine
    8 x 8 x 8 mm, 12 x 12 x 12 mm
  • Total Travel
    50.8 mm
  • Type
    Semi Automatic
  • Wafer Size
    12 Inches

Technical Documents
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