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AP-80A

Wafer Probe System by Micronics Japan Co.,Ltd (6 more products)
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Product Specifications

Product Details

  • Part Number
    AP-80A
  • Manufacturer
    Micronics Japan Co.,Ltd

General Parameters

  • Accuracy
    10 µm
  • Chuck Size
    210 x 250 mm
  • Net Weight
    500 kg
  • Operating Temperature
    40 to 200 Degree C
  • Overall Dimensions
    820 x 930 x 1220 mm
  • Repeatability
    2 µm
  • Resolution
    1 µm
  • Theta Movement
    5 Degree
  • Type
    Semi Automatic
  • Wafer Size
    200 mm
  • Z Travel Area
    9 mm+0.5 mm

Technical Documents
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