1. Home
  2. Semiconductor Equipment
  3. Test / Inspection Equipment
  4. Wafer Probe System
  5. Pegasus Instrument Inc
  6. PG2101

PG2101

Wafer Probe System by Pegasus Instrument Inc
Download Datasheet Request Information

Note : Your request will be directed to Pegasus Instrument Inc.

Product Specifications

Product Details

  • Part Number
    PG2101
  • Manufacturer
    Pegasus Instrument Inc

General Parameters

  • Accuracy
    7 µm
  • Chuck Size
    210 x 265 mm
  • Net Weight
    400 Kg
  • Overall Dimensions
    840 x 1000 x 1570 mm
  • Power Supply
    100-240VAC, 47/63 Hz, 10A
  • Repeatability
    4 µm
  • Resolution
    0.5 µm
  • Theta Movement
    10 Degree
  • Theta Stage Resolution
    0.001 Degree
  • Type
    Semi Automatic
  • Vacuum
    0.5 CFM at 20 inches Hg
  • Wafer Size
    4 to 6 Inches
  • Z Accuracy
    2 µm
  • Z Repeatability
    4 µm
  • Z Resolution
    1 µm
  • Z Travel Area
    0.5 to 7.5 mm

Technical Documents
View similar products