OPUS3 ST

Wafer Probe System by SEMICS Inc (7 more products)

Note : Your request will be directed to SEMICS Inc.

Product Specifications

Product Details

  • Part Number
    OPUS3 ST
  • Manufacturer
    SEMICS Inc

General Parameters

  • Accuracy
    1 µm
  • Chuck Size
    180 x 175 mm
  • Operating Temperature
    150 to 200 Degree C
  • Overall Dimensions
    1700 x 2030 x 1380 mm
  • Probing Force
    450 kgf, 750 kgf
  • Type
    Automatic
  • Wafer Size
    6 Inches, 8 Inches, 12 Inches

Technical Documents