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SA-8

Wafer Probe System by SemiProbe (11 more products)
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Product Specifications

Product Details

  • Part Number
    SA-8
  • Manufacturer
    SemiProbe

General Parameters

  • Accuracy
    3 µm
  • Chuck Size
    205 x 205 mm
  • Microscope Mounting Movement
    Boom, Post, Bridge
  • Mounting Movement
    50 x 50 mm, 50 x 75 mm, 100 x 100 mm, 200 x 200 mm
  • Net Weight
    90 kg
  • Overall Dimensions
    900 x 650 x 750 mm
  • Planarity
    6 µm
  • Platen Travel Size
    40 mm
  • Power Supply
    AC 110/220 V AC 50-60 Hz 20 A
  • Repeatability
    0.5 µm
  • Resolution
    0.1 µm
  • Theta Movement
    4 Degree
  • Type
    Semi Automatic
  • Vacuum
    23 Hg, 0.8 bar
  • Wafer Size
    Up to 200 mm
  • XY Moving Speed
    50 mm/sec max
  • Z Repeatability
    1.5 µm
  • Z Resolution
    0.5 µm
  • Z Travel Area
    15 mm

Technical Documents
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