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M-6

Wafer Probe System by Semishare Co., Ltd (14 more products)
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Product Specifications

Product Details

  • Part Number
    M-6
  • Manufacturer
    Semishare Co., Ltd

General Parameters

  • Accuracy
    10 µm
  • Chuck Size
    150 x 150 mm
  • Magnification
    16 to 100X, 200X
  • Net Weight
    52 kg
  • Overall Dimensions
    650 x 490 x 620 mm
  • Platen Travel Size
    50.8 mm
  • Power Supply
    220VC, 50/60 Hz
  • Probe Rotation
    360 Degree
  • Stage Travel Range Fine
    12 x 12 x 12 mm
  • Theta Movement
    45 Degree C
  • Type
    Manual
  • Wafer Size
    6 Inches

Technical Documents
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