P-8XLm

Wafer Probe System by Tokyo Electron Limited (4 more products)

Note : Your request will be directed to Tokyo Electron Limited.

Product Specifications

Product Details

  • Part Number
    P-8XLm
  • Manufacturer
    Tokyo Electron Limited

General Parameters

  • Accuracy
    2 µm
  • Probing Force
    60 kg
  • Stage Types
    Ball Screw
  • Type
    Automatic
  • Wafer Size
    100 mm, 125 mm, 150 mm, 200 mm
  • Z Accuracy
    5 µm

Technical Documents