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S200D

Wafer Probe System by Wentworth Laboratories Ltd (1 more product)
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Product Specifications

Product Details

  • Part Number
    S200D
  • Manufacturer
    Wentworth Laboratories Ltd

General Parameters

  • Accuracy
    7 µm
  • Automatic Alignment Repeatability
    5.0 µm
  • Caliper Arm Assembly Repeatability
    6.0 µm
  • Caliper Arm Assembly Resolution
    2.0 µm
  • Chuck Size
    210 x 210 mm
  • Net Weight
    400 kg
  • Overall Dimensions
    1420 x 850 x 1080 mm
  • Planarity
    8 µm
  • Power Supply
    100-240 VAC 50/60 Hz auto select 600 VA
  • Repeatability
    4 µm
  • Resolution
    1.25 µm
  • Theta Movement
    8 Degree
  • Theta Stage Resolution
    0.2 µm
  • Total Travel
    11.4 mm
  • Type
    Semi Automatic
  • Vacuum
    0.5 cfm
  • Wafer Size
    Up to 200 mm
  • XY Moving Speed
    100 mm/sec
  • Z Travel Area
    50 mm

Technical Documents
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