MUX?2021

Wafer X-Ray Inspection Machine by Mars Tohken Solution (2 more products)

Note : Your request will be directed to Mars Tohken Solution.

Product Specifications

Product Details

  • Part Number
    MUX?2021
  • Manufacturer
    Mars Tohken Solution

General Parameters

  • Detector
    High sensitivity x-ray detector (16-bit)
  • Field of View
    17 x 17 mm
  • Resolution
    0.4 µm
  • Spatial Resolution
    100 nm or less
  • Tube Current
    10 to 200 µA
  • Tube Voltage
    20 to 100 kV

Technical Documents