1. Home
  2. Semiconductor Equipment
  3. Test / Inspection Equipment
  4. Wafer X-Ray Inspection Machines
  5. Rigaku Corporation
  6. ONYX 3000

ONYX 3000

Wafer X-Ray Inspection Machine by Rigaku Corporation (1 more product)
Download Datasheet Request Information

Note : Your request will be directed to Rigaku Corporation.

Product Specifications

Product Details

  • Part Number
    ONYX 3000
  • Manufacturer
    Rigaku Corporation

General Parameters

  • Detector
    Silicon drift detector (SDD) optional: light element detector (C, N, O, F.S)
  • Field of View
    5 x 5 mm, 1 x 1 mm
  • Focus Spot Size
    10 to 50 µm
  • Image Acquisition
    2D, 3D
  • Magnification
    2X, 10X
  • Max Tube Power
    Up to 50 kV, 50 W
  • Pixel Size
    0.435 µm, 2.17 µm
  • Resolution
    1 µm

Technical Documents