8220-T

Thin Film Deposition Equipment by Meitu Semiconductor

Note : Your request will be directed to Meitu Semiconductor.

8220-T Image

Product Specifications

Product Details

  • Part Number
    8220-T
  • Manufacturer
    Meitu Semiconductor

General Parameters

  • Number of Heaters
    1 to 3 sets
  • Temperature Range
    Up to 400 Degree C
  • Type
    ALD Process
  • Uniform Gas
    Up to 5 Gas Lines
  • Vaccum
    7 Pa
  • Wafer Size
    4 to 8 Inches

Technical Documents