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nSpec CPS

Wafer Automated Optical Inspection (AOI) Equipment by Nanotronics (4 more products)
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Product Specifications

Product Details

  • Part Number
    nSpec CPS
  • Manufacturer
    Nanotronics

General Parameters

  • Air Supply
    60 PSI (415 kPa)
  • Cassette Load Port
    200 mm cassette adapter for Load Port
  • Centered Load Capability
    5 kg
  • Light Source
    White Light LED
  • Magnification
    2.5X, 5X, 10X, 20X, 50X
  • Net Weight
    1180 kg
  • Overall Dimensions
    2400 x 1940 x 2620 mm
  • Power Supply
    208?-240 VAC, 15A, 50/60 Hz
  • Repeatability
    +/- 2 µm
  • Resolution
    50 nm
  • Stage Flatness
    20 µm
  • Type
    Wafer AOI
  • X and Y Travel Area
    350 mm

Technical Documents
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