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nSpec PRISM

Wafer Automated Optical Inspection (AOI) Equipment by Nanotronics (4 more products)
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Product Specifications

Product Details

  • Part Number
    nSpec PRISM
  • Manufacturer
    Nanotronics

General Parameters

  • Cassette Load Port
    25 wafers / cassette, single Standard H-Bar
  • Centered Load Capability
    2.27 kg
  • Light Source
    LED, UV LED, White
  • Magnification
    1.25X, 2X, 2.5X, 4X, 5X, 10X, 20X, 50X
  • Net Weight
    363 kg
  • Overall Dimensions
    2360 x 1570 x 1940 mm
  • Power Supply
    208?-240 VAC, 15A, 50/60 Hz
  • Repeatability
    0.5 µm
  • Resolution
    50 nm
  • Stage Flatness
    30 µm
  • Type
    Wafer AOI
  • Wafer Size
    50 to 200 mm
  • X and Y Travel Area
    200 x 200 mm

Technical Documents
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