NanoPro-100

Wafer Automated Optical Inspection (AOI) Equipment by Zhonggui Optoelectronic Equipment Co., Ltd

Note : Your request will be directed to Zhonggui Optoelectronic Equipment Co., Ltd.

NanoPro-100 Image

Product Specifications

Product Details

  • Part Number
    NanoPro-100
  • Manufacturer
    Zhonggui Optoelectronic Equipment Co., Ltd

General Parameters

  • Defect Size
    0.13 to 0.18 µm
  • Die Size
    100 nm
  • IC Post Processing
    300 nm
  • IC Pre Process
    130 nm
  • Production Throughput
    61 wph
  • Type
    Wafer AOI
  • Wafer Size
    8 Inches, 12 Inches

Technical Documents