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  6. JJ-CCP100A

JJ-CCP100A

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Product Specifications

Product Details

  • Part Number
    JJ-CCP100A
  • Manufacturer
    Henan Chuanghe Laboratory Equipment Co., Ltd

General Parameters

  • Air Supply
    5 Pa, 2L/min
  • Applications
    Plamsa Etching
  • Chamber Size
    150 mm, 200 mm
  • Gases Control
    10 to 300 sccm MFC
  • Overall Dimensions
    630 x 550 x 500 mm
  • Plasma Power
    13.56 MHz 500W
  • Power Supply
    220V, 50 Hz, 1500 W
  • Process Type
    Dry Etching
  • Substrates
    Stainless Steel
  • Wafer Size
    4 Inches, 6 Inches

Technical Documents