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Model-SPS

Wafer Etching System by Modutek Corporation
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Model-SPS Image

Product Specifications

Product Details

  • Part Number
    Model-SPS
  • Manufacturer
    Modutek Corporation

General Parameters

  • Prerinse Time
    0-9999 Seconds
  • Process Chemistry Temperature
    1 to 2 Degree C
  • Process Time
    0-9999 to 0.0-999.9 Seconds
  • Process Type
    Wet Etching
  • Quick Dump Cycle
    0 to 9999 Cycles
  • Rotation Speed
    0 to 80 rpm
  • Wafer Size
    152 mm

Technical Documents