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Certas LEAGA

Wafer Etching System by Tokyo Electron Limited (4 more products)
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Product Specifications

Product Details

  • Part Number
    Certas LEAGA
  • Manufacturer
    Tokyo Electron Limited

General Parameters

  • Applications
    Dielectric Etching, Chemical Dry Etching
  • Number Of Chambers
    1 to 6
  • Process Type
    Dry Etching
  • Substrates
    Si
  • Wafer Size
    300 mm

Technical Documents