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RAD-2510F/8

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Product Specifications

Product Details

  • Part Number
    RAD-2510F/8
  • Manufacturer
    LINTEC Corporation Advanced Materials Operations

General Parameters

  • Air Supply
    0.6 to 0.8 Mpa, 300 L/min
  • Efficiency
    120 wafer/h
  • Net Weight
    1500 kg
  • Overall Dimensions
    1360 x 1830 x 1800 mm
  • Power Supply
    Single Phase AC 200-230V 10% (AC 190-253V) 50/60 Hz, 1.5 kW
  • Type
    Automatic
  • Vaccum
    >-80 kPa
  • Wafer Size
    100 mm, 125 mm, 150 mm, 200 mm

Technical Documents
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