ATM-12100

Wafer Mounting Equipment by Toyo Adtec Co., Ltd (4 more products)

Note : Your request will be directed to Toyo Adtec Co., Ltd.

ATM-12100 Image

Product Specifications

Product Details

  • Part Number
    ATM-12100
  • Manufacturer
    Toyo Adtec Co., Ltd

General Parameters

  • Air Supply
    0.6 to 0.8 Mpa 600 L/min
  • Efficiency
    50 wafer/h
  • Membrane Width
    300 mm, 400 mm
  • Net Weight
    1800 kg
  • Overall Dimensions
    2100 x 2300 x 2000 mm
  • Power Supply
    AC200V 3 Phase 50/60 Hz 14 KVA
  • Type
    Automatic
  • Wafer Size
    8 Inches, 12 Inches

Technical Documents