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AP-300

Wafer Probe System by Apollo Wave Inc (7 more products)
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Product Specifications

Product Details

  • Part Number
    AP-300
  • Manufacturer
    Apollo Wave Inc

General Parameters

  • Accuracy
    10 µm
  • Chuck Size
    320 x 500 mm
  • Net Weight
    800 kg
  • Operating Temperature
    -60 to 350 Degree C
  • Overall Dimensions
    880 x 1260 x 1030 mm
  • Power Supply
    20kV DC/200A
  • Resolution
    0.1 µm
  • Theta Movement
    6 Degree
  • Theta Stage Resolution
    0.000022294 Degree
  • Type
    Semi Automatic
  • Wafer Size
    12 Inches
  • XY Moving Speed
    25 mm/sec
  • Z Repeatability
    3 µm
  • Z Travel Area
    80 mm

Technical Documents
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