MPS150

Wafer Probe System by FormFactor (10 more products)

Note : Your request will be directed to FormFactor.

Product Specifications

Product Details

  • Part Number
    MPS150
  • Manufacturer
    FormFactor

General Parameters

  • Chuck Size
    155 x 155 mm
  • Operating Temperature
    30 to 300 Degree C
  • Planarity
    3 µm
  • Platen Travel Size
    40 mm
  • Resolution
    5 µm
  • Theta Movement
    8 Degree
  • Theta Stage Resolution
    7.5 x 10-3 gradient
  • Type
    Manual
  • Wafer Size
    150 mm

Technical Documents