MPS150-SiPh

Wafer Probe System by FormFactor (10 more products)

Note : Your request will be directed to FormFactor.

Product Specifications

Product Details

  • Part Number
    MPS150-SiPh
  • Manufacturer
    FormFactor

General Parameters

  • Chuck Size
    155 x 155 mm
  • Planarity
    10 µm
  • Repeatability
    < 1 µm
  • Resolution
    5 µm
  • Stage Travel Range Fine
    50 x 50 mm, 150 x 100 mm
  • Theta Movement
    8 Degree
  • Theta Stage Resolution
    7.5 x 10-3 gradient
  • Type
    Manual
  • Z Travel Area
    12.5 mm

Technical Documents