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PM300

Wafer Probe System by FormFactor (10 more products)
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Product Specifications

Product Details

  • Part Number
    PM300
  • Manufacturer
    FormFactor

General Parameters

  • Operating Temperature
    +25 to +200 Degree C
  • Planarity
    < 5 µm, < +/- 10 µm
  • Power Supply
    115 / 230 V, 50 / 60 Hz
  • Resolution
    < 5 µm
  • Stage Travel Range Fine
    10 x 10 mm
  • Theta Movement
    8 Degree
  • Type
    Manual
  • Vacuum
    - 0.8 bar
  • Wafer Size
    300 mm
  • Z Travel Area
    40 mm

Technical Documents
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