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PM8

Wafer Probe System by FormFactor (10 more products)
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Product Specifications

Product Details

  • Part Number
    PM8
  • Manufacturer
    FormFactor

General Parameters

  • Chuck Flatness
    = 8 µm
  • Chuck Size
    200 mm
  • Operating Temperature
    +25 to +200 Degree C
  • Planarity
    = ± 6 µm
  • Repeatability
    = 2 µm
  • Resolution
    1 µm
  • Stage Travel Range Fine
    10 x 10 mm
  • Theta Movement
    6 Degree
  • Theta Stage Resolution
    < 6.75 x 10-3
  • Type
    Manual
  • Wafer Size
    Up to 200 mm
  • Z Repeatability
    = 2 µm

Technical Documents
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