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SUMMIT200 M

Wafer Probe System by FormFactor (10 more products)
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Product Specifications

Product Details

  • Part Number
    SUMMIT200 M
  • Manufacturer
    FormFactor

General Parameters

  • Accuracy
    5 µm (Fast Mode), 2.5 µm (Standard Mode), 2.0 µm (Accurate Mode)
  • Chuck Size
    203 x 203 mm
  • Operating Temperature
    -60 to 300 Degree C
  • Planarity
    20 µm
  • Probing Force
    20 kg
  • Repeatability
    3.5 µm (Fast Mode), 2.0 µm (Standard Mode), 1.5 µm (Accurate Mode)
  • Resolution
    0.2 µm
  • Theta Movement
    7.5 Degree
  • Theta Stage Accuracy
    2 µm, 3 µm
  • Theta Stage Repeatabilty
    1.5 µm
  • Theta Stage Resolution
    0.5 µm
  • Type
    Automatic
  • Wafer Size
    200 mm
  • XY Moving Speed
    Up to 100 mm/sec
  • Z Repeatability
    1 µm
  • Z Resolution
    1 µm
  • Z Travel Area
    35 mm

Technical Documents
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