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LCS-4000

Wafer Probe System by MicroXact Inc (7 more products)
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Product Specifications

Product Details

  • Part Number
    LCS-4000
  • Manufacturer
    MicroXact Inc

General Parameters

  • Chuck Flatness
    13 µm
  • Chuck Size
    100 x 100 mm
  • Net Weight
    230 kg
  • Overall Dimensions
    600 x 740 x 920 mm
  • Planarity
    12.7 µm
  • Platen Travel Size
    12.7 mm
  • Power Supply
    110 VAC, 20 A or 220 VAC, 15 A
  • Probe Rotation
    360 Degree
  • Pulse Width
    3 to 4 ns
  • Repeatability
    1.5 µm
  • Resolution
    1.5 µm
  • Type
    Semi Automatic
  • Wafer Size
    Up to 100 mm
  • Wavelength
    1064 nm, 532 nm, 355nm

Technical Documents
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