1. Home
  2. Semiconductor Equipment
  3. Test / Inspection Equipment
  4. Wafer Probe System
  5. MicroXact Inc
  6. SPS- 1000

SPS- 1000

Wafer Probe System by MicroXact Inc (7 more products)
Download Datasheet Request Information

Note : Your request will be directed to MicroXact Inc.

Product Specifications

Product Details

  • Part Number
    SPS- 1000
  • Manufacturer
    MicroXact Inc

General Parameters

  • Chuck Flatness
    13 µm, 3 µm
  • Chuck Size
    100 x 100 mm, 150 x 150 mm
  • Magnification
    3.5 to 180X
  • Planarity
    12.7 µm, 5 µm
  • Platen Travel Size
    12.7 mm
  • Probe Rotation
    360 Degree
  • Resolution
    3 µm, 2 µm
  • Theta Movement
    6 Degree
  • Type
    Manual
  • Vacuum
    600 torr
  • Wafer Size
    Up to 150 mm
  • Z Resolution
    1 µm
  • Z Travel Area
    10 mm

Technical Documents
View similar products