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SPS- 1200

Wafer Probe System by MicroXact Inc (7 more products)
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Product Specifications

Product Details

  • Part Number
    SPS- 1200
  • Manufacturer
    MicroXact Inc

General Parameters

  • Chuck Flatness
    13 µm, 3 µm
  • Chuck Size
    200 x 200 mm
  • Magnification
    3.5 to 180X
  • Planarity
    12.7 µm, 5 µm
  • Platen Travel Size
    12 mm
  • Probe Rotation
    360 Degree
  • Repeatability
    1.5 µm
  • Resolution
    3 µm, 2 µm
  • Theta Movement
    6 Degree
  • Type
    Manual
  • Wafer Size
    Up to 200 mm

Technical Documents
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