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SPS- 2000

Wafer Probe System by MicroXact Inc (7 more products)
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Product Specifications

Product Details

  • Part Number
    SPS- 2000
  • Manufacturer
    MicroXact Inc

General Parameters

  • Chuck Flatness
    13 µm
  • Chuck Size
    100 x 100 mm
  • Magnification
    3.5 to 180X
  • Net Weight
    95 kg
  • Overall Dimensions
    780 x 800 x 580 mm
  • Planarity
    12.7 µm
  • Platen Travel Size
    12.7 mm
  • Probe Rotation
    360 Degree
  • Repeatability
    1.5 µm
  • Resolution
    5 µm
  • Theta Movement
    6 Degree
  • Type
    Manual
  • Vacuum
    600 torr
  • Wafer Size
    Up to 100 mm

Technical Documents
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