1. Home
  2. Semiconductor Equipment
  3. Test / Inspection Equipment
  4. Wafer Probe System
  5. MicroXact Inc
  6. SPS- 2600-PLUS

SPS- 2600-PLUS

Wafer Probe System by MicroXact Inc (7 more products)
Download Datasheet Request Information

Note : Your request will be directed to MicroXact Inc.

Product Specifications

Product Details

  • Part Number
    SPS- 2600-PLUS
  • Manufacturer
    MicroXact Inc

General Parameters

  • Chuck Flatness
    13 µm
  • Chuck Size
    125 x 125 mm
  • Magnification
    3.5 to 180X
  • Net Weight
    95 kg
  • Overall Dimensions
    780 x 800 x 580 mm
  • Planarity
    12.7 µm
  • Platen Travel Size
    12.7 mm
  • Power Supply
    110 VAC, 15 A or 220 VAC, 10 A
  • Probe Rotation
    360 Degree
  • Repeatability
    1.5 µm
  • Resolution
    1.5 µm
  • Theta Movement
    6 Degree
  • Type
    Semi Automatic
  • Wafer Size
    Up to 100 mm

Technical Documents
View similar products