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SPS-2800

Wafer Probe System by MicroXact Inc (7 more products)
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Product Specifications

Product Details

  • Part Number
    SPS-2800
  • Manufacturer
    MicroXact Inc

General Parameters

  • Chuck Flatness
    13 µm
  • Chuck Size
    200 x 200 mm
  • Magnification
    3.5 to 180X
  • Net Weight
    95 kg
  • Overall Dimensions
    1220 x 1220 x 920 mm
  • Planarity
    12.7 µm
  • Platen Travel Size
    12.7 mm
  • Power Supply
    110 VAC, 15 A or 220 VAC, 10 A
  • Probe Rotation
    360 Degree
  • Resolution
    1.5 µm
  • Theta Movement
    6 Degree
  • Type
    Semi Automatic
  • Wafer Size
    Up to 200 mm
  • XY Moving Speed
    9.5 mm/sec
  • Z Resolution
    400 nm

Technical Documents
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