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TS200-HP

Wafer Probe System by MPI Corporation (24 more products)
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Product Specifications

Product Details

  • Part Number
    TS200-HP
  • Manufacturer
    MPI Corporation

General Parameters

  • Chuck Size
    225 x 260 mm
  • Mounting Movement
    50 x 50 mm
  • Net Weight
    500 kg
  • Overall Dimensions
    900 x 1090 x 1910 mm
  • Planarity
    10 µm
  • Power Supply
    100-240 V AC 50/60 Hz
  • Resolution
    1 µm
  • Theta Movement
    5 Degree
  • Theta Stage Resolution
    7.5 x 10-3 gradient
  • Type
    Manual
  • Vacuum
    -0.3 bar
  • Wafer Size
    100 mm, 200 mm
  • Z Resolution
    1 µm
  • Z Travel Area
    5 mm

Technical Documents
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