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TS2000-DP

Wafer Probe System by MPI Corporation (24 more products)
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Product Specifications

Product Details

  • Part Number
    TS2000-DP
  • Manufacturer
    MPI Corporation

General Parameters

  • Accuracy
    4 µm
  • Chuck Size
    210 X 340 mm
  • Mounting Movement
    100 x 30 mm
  • Net Weight
    500 kg
  • Overall Dimensions
    980 x 1100 x 1650 mm
  • Planarity
    5 µm
  • Power Supply
    100-240 V AC 50/60 Hz
  • Repeatability
    2 µm
  • Resolution
    1 µm
  • Theta Movement
    5 Degree
  • Theta Stage Accuracy
    3.0 µm
  • Theta Stage Repeatabilty
    2.0 µm
  • Theta Stage Resolution
    0.0004 Degree
  • Type
    Automatic
  • Vacuum
    -0.9 bar
  • Wafer Size
    200 mm
  • XY Moving Speed
    100 mm/sec
  • Z Accuracy
    2 µm
  • Z Repeatability
    3 µm
  • Z Resolution
    0.2 µm
  • Z Travel Area
    10 mm

Technical Documents
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