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TS2000-HP

Wafer Probe System by MPI Corporation (24 more products)
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Product Specifications

Product Details

  • Part Number
    TS2000-HP
  • Manufacturer
    MPI Corporation

General Parameters

  • Accuracy
    2 µm
  • Chuck Size
    210 x 300 mm
  • Mounting Movement
    50 x 50 mm
  • Net Weight
    700 kg
  • Overall Dimensions
    1420 x 1140 x 1740 mm
  • Planarity
    5 µm
  • Power Supply
    100-240 V AC 50/60 Hz
  • Repeatability
    2 µm
  • Resolution
    0.5 µm
  • Theta Movement
    6 Degree
  • Theta Stage Accuracy
    2.0 µm
  • Theta Stage Repeatabilty
    1 µm
  • Theta Stage Resolution
    0.0004 Degree
  • Type
    Automatic
  • Vacuum
    -0.9 bar
  • Wafer Size
    200 mm
  • XY Moving Speed
    20 mm/sec
  • Z Accuracy
    2 µm
  • Z Repeatability
    1 µm
  • Z Resolution
    0.2 µm
  • Z Travel Area
    50 mm

Technical Documents
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